au.\*:("HOLM, Ron")
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Inductively coupled plasma etching of nano-pattemed sapphire for flip-chip GaN light emitting diode applicationsKIM, Byung-Jae; MASTRO, Michael A; JUNG, Hyunjung et al.Thin solid films. 2008, Vol 516, Num 21, pp 7744-7747, issn 0040-6090, 4 p.Article
